Metalorganic Vapour Phase Epitaxy
Metalorganic Vapour Phase Epitaxy- is a method of creating controllable epitaxial layered structures by atomic deposition over a substrate material. A substrate wafer is placed on a graphite susceptor and heated in a reaction vessel. Compounds are grown in a hydrogen atmosphere and then form epitaxial layers on the substrate as they decompose.
External links
| Authors | |
|---|---|
| License | CC-BY-SA-3.0 |
| Cite as | "Metalorganic Vapour Phase Epitaxy". Appropedia. 2008–2025. Retrieved November 28, 2025. |